Tuning the <i>Q</i>-factor of nanomechanical string resonators by torsion support design

نویسندگان

چکیده

In recent years, the Q-factor of [Formula: see text] nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports remained a challenge. Here, we make use torsion beam to tune string resonators. By design optimization supports, obtain 50% enhancement compared standard clamped–clamped performing experimental numerical studies, show that further improvement is limited trade-off between maximizing stress minimizing torsional stiffness. Thus, our study also provides insight into dissipation limits high-stress outlines how advanced designs can be realized for reaching ultimate product while maintaining small footprint.

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2023

ISSN: ['1520-8842', '0003-6951', '1077-3118']

DOI: https://doi.org/10.1063/5.0133177